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Vacuum pump
- EBARA
- ALCATEL
- EDWARDS
- LEYBOLD
- ULVAC
- BECKER
- BECKER
TECHNOLOGY_ DATA
- EBARA
- ALCATEL
- EDWARDS
Gang fixture
- EBARA
- ALCATEL
  - ADP series
- EDWARDS
- LEYBOLD
pump parts
- Spare parts
  - Felt Element
  - Gasket
  - ORing
  - Seal
  - Bearing
  - Sleeve
  - Valve Element
  - Spring
  - Vane
  - coupling element
  - Oil Sight Element
  - hardware
  - Carbonate Vane
  - Tip Seal
  - SHIM
  - Other
- Repair kits
  - ALCATEL
  - EBARA
  - EDWARDS
  - LEYBOLD
  - BUSCH
  - Anest Iwata
  - ULVAC
  - RIETSCHLE
  - IWATA
  - ANLET
  - BECKER
  - ORION
  - VARIAN
- Filter equipment
Pump main parts
- Stator
- Plate
- Rotor
- Gear
- Rotating shaft
- Frame
- Bearing housing
- Wheels
Electronic Accessories
- FLOWMETER
  - EBARA
  - EDWARDS
  - ALCATEL
- SENSOR
- Circuit board
  - EBARA
  - EDWARDS
  - ALCATEL
- Inverter
  - EDWARDS
  - EBARA
- PANEL
  - EBARA
  - EDWARDS
  - KASHIYAMA
  - ALCATEL
- INTERFACE
  - EDWARDS
  - EBARA
- MODULE
  - EDWARDS
- OTHER
Vacuum grease
External filter
Adsorber
維修零件BOM
- ALCATEL
- EBARA
- EDWARDS
- LEYBOLD
- BUSCH
- ANEST LWATE
- ULVAC
- RIETSCHLE
- IWATA
- ANLET
- BECKER
- LEYBOLD
- VARIAN

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